XRDmap Pro Wafer Edition

自動(dòng)化晶圓定向檢測(cè)系統(tǒng)

Inline wafer orientation mapping truly fab compliant

在線式晶圓取向圖譜分析，符合晶圓廠標(biāo)準(zhǔn)      

Optimize wafer alignment inline for higher productivity

在線優(yōu)化晶圓對(duì)準(zhǔn)，大幅提升產(chǎn)能

Materials

材料

The XRDmap Pro Wafer Edition enables maximum value add by tuning subsequent processes such as epitaxy, lithography and implanting to the crystal orientation. This enables supplier process compliance and a smooth material flow by its ultra-fast measurement speed and seamless factory automation.

XRDmap Pro 晶圓版可實(shí)現(xiàn)價(jià)值—— 通過(guò)使外延、光刻、離子注入等后續(xù)工藝與晶體取向精確適配，憑借超高速的測(cè)量速度與無(wú)縫的工廠自動(dòng)化集成能力，既能確保供應(yīng)商工藝合規(guī)，又能實(shí)現(xiàn)物料流轉(zhuǎn)順暢高效。

Features & Benefits

重要特性與重要價(jià)值:   

Applications 應(yīng)用

Precise Surface Orientation Mapping with Omega-Scan

Even within a single crystal, slight variations in crystal orientation can occur across the surface, often due to internal strains from lattice defects. Similarly, well-grown thin films can display unique in-plane orientation distributions.

即便是同一塊單晶，其表面不同區(qū)域也可能存在晶體取向的細(xì)微偏差，這類偏差通常源于晶格缺陷引發(fā)的內(nèi)應(yīng)力。同理，生長(zhǎng)狀態(tài)良好的薄膜也會(huì)呈現(xiàn)出獨(dú)特的面內(nèi)取向分布。

Mapping such surfaces typically requires numerous measurements, and this is where the Omega-Scan method excels with its speed and efficiency. The image below illustrates an orientation map measured on a (Si, Ge) solid solution wafer, where the maximum orientation difference is just 0.03°. The concentric circles in the map correspond to the crystal’s growth rings, providing valuable insights into its structure.

對(duì)這類晶體表面進(jìn)行取向測(cè)繪通常需要開展大量測(cè)量工作，而這正是Omega 掃描法的優(yōu)勢(shì)所在 —— 憑借其優(yōu)異的檢測(cè)速度與效率脫穎而出。

下方圖像展示的是一塊硅鍺固溶體晶圓的取向分布圖，該晶圓大的取向偏差只為 0.03°。圖中的同心圓與晶體的生長(zhǎng)環(huán)一一對(duì)應(yīng)，為分析其晶體結(jié)構(gòu)提供了重要依據(jù)。

Advantages of the Omega-Scan Method

Omega-Scan 方法重要優(yōu)勢(shì) （Freiberg Instruments 重要技術(shù)）：

---Stable and Simplified Setup

The X-ray tube and detector remain fixed, requiring only a single measuring circle and no monochromator.

穩(wěn)定便捷的安裝調(diào)試

X 射線管與探測(cè)器固定不動(dòng)，只需單次測(cè)量周期，且無(wú)需單色儀。

---Comprehensive Data Collection

All necessary data for full orientation determination is captured in just one rotation.

全方面數(shù)據(jù)采集

單次旋轉(zhuǎn)即可采集全定向測(cè)定所需全部數(shù)據(jù)。

--High Precision with Minimal Measurement Time

The method delivers exceptional accuracy within a short measurement duration.

高精度?測(cè)量耗時(shí)短

短時(shí)間內(nèi)即可實(shí)現(xiàn)優(yōu)異精度。

These features make the Omega-Scan method particularly well-suited for routine measurements and industrial applications, where speed and reliability are essential.

憑借這些特性，Omega-Scan 方法尤為適配常規(guī)測(cè)量與工業(yè)應(yīng)用場(chǎng)景 —— 這類場(chǎng)景對(duì)速度與可靠性有著重要要求。

Understanding the Omega-Scan Method

解讀 Omega-Scan 方法

The Omega-Scan technique involves rotating the specimen 360° around a specific axis, such as the surface normal. The X-ray source and detector are positioned based on the crystal type to ensure an optimal number of reflections per turn. By analyzing the angular positions of these reflections, the crystal lattice orientation is determined in relation to the rotation axis.

Omega-Scan 技術(shù)的工作原理為：將試樣繞某一特定軸（如表面法線）完成 360° 旋轉(zhuǎn)，X 射線源與探測(cè)器則根據(jù)晶體類型進(jìn)行定位，以確保每圈旋轉(zhuǎn)均可獲得優(yōu)異的反射次數(shù)。通過(guò)分析這些反射信號(hào)的角度位置，即可確定晶格取向相對(duì)于旋轉(zhuǎn)軸的具體方位。

To precisely align the lattice orientation with the crystal surface, a laser beam checks the surface direction. Other relevant reference planes or directions can also be measured using optical tools. This technique enables accurate orientation measurement of single crystals in any configuration, achieving a reproducibility within a few arc seconds—often in just a few seconds of measurement.

為精確校準(zhǔn)晶格取向與晶體表面的對(duì)位關(guān)系，激光束會(huì)對(duì)晶體表面方向進(jìn)行檢測(cè)。其余相關(guān)參考平面或方向，亦可通過(guò)光學(xué)工具完成測(cè)量。

該技術(shù)可實(shí)現(xiàn)對(duì)任意形態(tài)單晶的高精度取向測(cè)量，重復(fù)性精度控制在數(shù)角秒范圍內(nèi) —— 且單次測(cè)量耗時(shí)通常只需數(shù)秒。

A specialized application of the Omega-Scan method is precision lattice-parameter determination, particularly for cubic crystals, providing highly accurate structural insights.

Omega-Scan 方法的一項(xiàng)專業(yè)應(yīng)用方向?yàn)楦呔染Ц駞?shù)測(cè)定，該應(yīng)用尤其適用于立方晶體，可提供高精度的晶體結(jié)構(gòu)解析能力。

User-Friendly and Advanced Operating Software

人性化操作軟件

多種操作模式

操作員模式：采用固定測(cè)量參數(shù)設(shè)計(jì)，保障操作流程安全高效。

管理員模式：支持測(cè)量配方的創(chuàng)建與修改，可針對(duì)新型材料調(diào)整參數(shù)。

直觀引導(dǎo)式操作界面

確保不同經(jīng)驗(yàn)水平的用戶，均可享受到流暢高效的操作流程。

預(yù)設(shè)配方與自定義配方雙模式

既可從豐富的現(xiàn)成配方中直接選用，也可根據(jù)特定需求創(chuàng)建專屬配方。

測(cè)量結(jié)果與修正值自動(dòng)顯示

可即時(shí)查看測(cè)量結(jié)果，同步自動(dòng)生成修正值，助力晶格取向精確調(diào)校。

圖譜分析功能

搭載圖譜分析功能，賦能高精度測(cè)量分析工作。

數(shù)據(jù)導(dǎo)入導(dǎo)出功能

自動(dòng)化晶圓定向檢測(cè)系統(tǒng)可輕松完成數(shù)據(jù)導(dǎo)入導(dǎo)出，便于數(shù)據(jù)共享及與其他系統(tǒng)的集成對(duì)接。